Deposition and spin polarization study of Fe4N thin films with (111) orientation
We have successfully deposited Fe4N thin films with (111) out-of-plane orientation on thermally oxidized Si substrates using a facing-target-sputtering system.A Ta/Ru composite buffer layer was adopted to improve the (111) orientation of the fleshlight automatique Fe4N thin films.The N2 partial pressure and substrate temperature during sputtering w